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Mask Services |
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 SMIC's
mask shop provides mask manufacturing services for SMIC's foundry
customers and other fabs and institutions. Currently, we have
China's largest and most advanced mask making facility with
0.5 ¦Ìm to 65 nm capabilities. Equipped with state-of-the-art
tools, the facility offers binary masks and phase shift masks
complete with optical proximity correction. Both 5"x5"
and 6"x6" reticles for I-line, G-line or deep UV KrF
and ArF steppers and scanners are available.
In-House Service Benefits
Customers utilizing SMIC mask
services as part of a turnkey solution can enjoy benefits such
as a shorter cycle time from tape-out to wafer start, reduced
risk of reticle damage during transportation, increased flexibility
of services and cost savings. In addition, they can also benefit
from the convenience of online mask data review and job deck
view tape-out services.
Mask Shop Quality
Stringent quality control at
our mask shop, coupled with our strong technology development
team, enables us to produce masks under tight critical dimensions
with low defect rates. Each mask set is recorded in our mask
status tracking system and vigilantly monitored to ensure delivery
of quality reticles. Regular checks help to prevent and/or enable
early detection of ESD damage, scratches, particles, pellicle
frames and aging.
Mask Shop Security
SMIC's mask shop exercises tight security control to ensure
protection of our customers' intellectual property (IP). A completely
secure and access-controlled mask shop production environment
is backed by tight mask shop network and protected behind an
isolated and dedicated mask shop firewall. Data and network
security include the following:
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An
independent mask data network, isolated behind a dedicated
mask shop firewall |
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A
dedicated and protected mask shop FTP server for tape-out
service |
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Mandatory
encryption for FTP transmission (PGP, GPG, Security box) |
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Tape storage in a safe with access tightly controlled |
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Camera
and alarm for security enforcement |
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Source
files are deleted six months after mask is shipped |
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Code
names are used in place of customer and product names |
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ISO15408
(smart card security standard) certified |
For more information and enquiries, please contact
us.
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